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Industrial GradeISO 9001 Certified

Vacuum Oven

Indeecon's vacuum ovens deliver precision drying, degassing, and bake-out across three performance tiers — from laboratory research (25–90L) to semiconductor production (150–250L) and heavy-duty industrial (500–1000L+). Semiconductor models meet J-STD-033 and IPC-A-610 for moisture-sensitive component handling with electropolished SS-316L chambers (under 0.01 mbar/h leak rate), inert gas purge/backfill ports, and optional direct-conduction shelf heating for ±2°C uniformity across wafer stacks.

1-Year Warranty
ISO 9001 Certified
Factory Tested
24/7 Support
Vacuum Oven
Systems Online

Core Engineering Features

Precision Control

Advanced PLC architecture delivering unmatched stability and real-time parameter tracking.

Rugged Construction

Industrial-grade materials engineered for 24/7 continuous operational stress.

Custom Integration

Flexible interfaces for seamless integration with factory automation networks.

Safety Compliance

Multi-tiered fail-safes and interlocks ensuring personnel and facility protection.

Technical Data

Full Specifications

Parameter
Value
Temp Range
Ambient +10°C to +250°C
Vacuum Range
760 to 0.1 mmHg (approx)
Controller
Digital PID Controller (Touchscreen optional)
Power Supply
230V AC Single Phase

Background

What is a Vacuum Oven?

A vacuum oven removes atmospheric moisture and dissolved gases from components under controlled temperature and pressure. Critical in semiconductor packaging, PCB assembly, and battery manufacturing where even trace moisture causes failure. Unlike conventional ovens, vacuum environments enable ultra-low pressure baking (as low as 0.1 mbar) without thermal degradation—ideal for MSL (Moisture Sensitivity Level) 5–6 components and wafer-level packaging.

Compliance

Applicable Standards

Standard
Description
Status
J-STD-033
— Handling, Packing, and Delivery of Moisture/Reflow Sensitive Devices
Compliant
IPC-A-610E
— Acceptability of Electronic Assemblies
Compliant
ISO 5
— Cleanroom Classification (Class 100 compatible chamber configurations)
Compliant
NABL
— Temperature and vacuum pressure calibration with ISO/IEC 17025 traceability
Compliant

Capabilities

What Makes Our Temperature and Humidity Chamber Stand Out

  • Semiconductor-Grade Electropolished Chambers: SS-316L internal surfaces with under 0.01 mbar/h leak rate — critical for sub-0.1 µm feature protection and MSL 5–6 bake-out
  • Precision Vacuum Control: Digital solenoid valves and Pirani/Capacitance Manometer gauges maintain steady-state vacuum ±5% over 8-hour bake cycles
  • Inert Gas Purge and Backfill: Integrated N₂/Ar ports enable oxygen-free cooling and chamber normalisation after vacuum cycles
  • Optional Direct-Shelf Conduction Heating: Individual shelf heaters provide ±2°C uniformity across wafer stacks — 30% faster thermal cycle vs radiant heating
  • Dual-Pane Observation Window: Tempered glass and polycarbonate shield for unobstructed part visibility — Class 100 cleanroom compatible
  • Modular Tool-Free Shelf Design: Rapid removal for thorough cleaning and lot reconfiguration between product batches
  • Three Performance Tiers: Laboratory (1.0 mbar, 50–200°C, 25–90L); Semiconductor (0.1 mbar, 50–250°C, 150–250L); Heavy-Duty (0.5 mbar, 50–300°C, 500–1000L+)

INDUSTRIES WE SERVE

Industries That Rely on Our Hot Chamber and Cold Chamber

MSL 5–6 Component Bake-Out

Pre-reflow moisture removal for BGAs, flip-chip assemblies, and moisture-sensitive wafer packages

Semiconductor Wafer Degassing

Pre-bonding outgassing for advanced interconnect and packaging processes

PCB Assembly Dry-Packing

Post-solder moisture removal before shipping and long-term storage

Battery Cell Pre-Drying

Cathode and anode material conditioning prior to cell assembly

Pharmaceutical Processing

Solvent removal and material drying in cleanroom-compatible environments

Contract Testing

High-throughput lot processing with SPC data logging and traceability documentation

Frequently Asked Questions

Still have questions? Our engineers are happy to help.

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Custom Configuration

Need a custom build?

Our engineering team can modify dimensions, controllers, and specs to match your exact protocol.